Fabrication of Metallic Nano Pillar Arrays on Substrate by Sputter Coating and Direct Imprinting Processes
Abstract
In this study, an efficient fabrication process of metallic nanostructures was proposed and the feasibility of the process was verified. This process comprises of direct imprinting and sputter coating techniques. Firstly in this process, a silicon wafer mother mold of nanopattern is prepared by photolithography and dry etching technique. The nanopatterns of mother mold are transferred to an acrylic film by hot embossing method. Secondly, a quartz glass substrate is cleaned in the acetone bath and then by sputter etching for cleaning the contamination on the surface. Then, a substrate is coated with a gold thin film by the Argon gas sputter coating process. Then, an acrylic film mold, whose surface has been patterned with the nanopatterns, is used to transfer directly of pillar pattern onto the gold thin film. As a result, the gold thin films are inflated as nanopillar arrays on the substrate. This is because of the imprinting load from an acrylic film mold is effective to transfer the nanopillar arrays onto a gold thin film. The experimental results show that an acrylic film mold is effective to form the nanopillar arrays on the Au film although the acrylic film mold is softer than Au thin film. Furthermore, the plasmonic properties of the nanopillar arrays are investigated. It is also found that the plasmonic nanopillar arrays show good performance as a localized surface plasmon resonance (LSPR)-active substrate. Feasibility of the proposed process is confirmed by experimental study, and efficiency of the process is discussed.
Keywords
[1] Y. B. Zheng, B. Kiraly, P. S. Weiss, and T. J. Huang, “Molecular plasmonics for biology and nanomedicine,” Nanomedicine, vol. 7, pp. 751– 770, 2012.
[2] T. Chung, S. Y. Le , E. Y. Song, H. Chun, and B. Lee, “Plasmonic nanostructures for nano-scale biosensing,” Sensors, vol. 11, pp. 10907–10929, 2011.
[3] H. A. Becerril, R. M. Stoltenberg, D. R. Wheeler, R. C. Davis, J. N. Harb, and A. T. Woolley, “DNA-templated three-branched nanostructures for nanoelectronic devices,” Journal of the American Chemical Society, vol. 127, no. 9, pp. 2828–2829, 2005.
[4] G. Shen and D. Chen, “One-dimensional nanostructures for electronic and optoelectronic devices,” Frontiers of Optoelectronics, vol. 3, pp. 125–138, 2010.
[5] D. H. Wei, W. H. Liao, and K.Y. Peng, “Light guide of Au nanostructures for color-filterness optoelectronic display devices,” Journal of Nanoscience and Nanotechnology, vol. 12, no. 2, pp. 1341–1343, 2012.
[6] F. Zaera, “Nanostructured materials for applications in heterogeneous catalysis,” Chemical Society Reviews, vol. 42, pp. 2746–2762, 2013.
[7] S. Duan, Z. Du, H. Fan, and R. Wang, “Nanostructure optimization of platinum-based nanomaterials for catalytic applications,” Nanomaterials, vol. 8, no.11, pp. 949(1)–949(20), 2018.
[8] X. Huang and M. A. El-Sayed, “Gold nanoparticles: Optical properties and implementations in cancer diagnosis and photothermal therapy,” Journal of Advanced Research, vol. 1, pp. 13–28, 2010.
[9] A. Zuber, M. Purdey, E. Schartner, C. Forbes, B. V. D. Hoek, D. Giles, A. Abell, T. Monro, and H. E.- Heidepriem, “Detection of gold nanoparticles with different sizes using absorption and fluorescence based method,” Sensors and Actuators B: Chemical, vol. 227, pp. 117–127, 2016.
[10] L. Guo, J. A. Jackman, H.-H. Yang, P. Chen, N.-J. Cho, and D.-H. Kim, “Strategies for enhancing the sensitivity of plasmonic nanosensors,” Nano Today, vol. 10, pp. 213–239, 2015.
[11] J. Liu, Y. Ma, J. Shao, S. Zhang, and Y. Chen, “Ultra-tall sub-wavelength gold nano pillars for high sensitive LSPR sensors,” Microelectronic Engineering, vol. 196, pp. 7–12, 2018.
[12] M. Dietiker, S. Buzzi, G. Pigozzi, J. F. Löffler, and R. Spolenaka, “Deformation behavior of gold nano-pillars prepared by nanoimprinting and focused ion-beam milling,” Acta Materialia, vol. 59, no. 5, pp. 2180–2192, 2011.
[13] N. Kim, S. Kim, M. Choi, H.-H. Park, N. H. Kim, S. Y. Park, K. M. Byun, and S. Y. Lee, “Combination of periodic hybrid nanopillar arrays and gold nanorods for improving detection performance of surface-enhanced Raman spectroscopy,” Sensors and Actuators B: Chemical, vol. 258, pp. 18–24, 2018.
[14] R. Krajcar, R. Denk, P. Zeppenfeld, P. Slepička, and V. Švorčíka, “Tuning the plasmonic behavior of metallic nanowires,” Materials Letters, vol. 165, pp. 181–184, 2016.
[15] J. Siegel, J. Heitz, A. Řezníčková, and V. Švorčíka, “Preparation and characterization of fully separated gold nanowire arrays,” Applied Surface Science, vol. 264, pp. 443–447, 2013.
[16] Y. Lin, Y. Zou, Y. Mo, J. Guo, and R. G. Lindquist, “E-beam patterned gold nanodot arrays on optical fiber tips for localized surface plasmon resonance biochemical sensing,” Sensors, vol. 10, pp. 9397–9406, 2010.
[17] S. A. Hasim, M. C. C. Romero, T. Ghoshal, M. A. Morris, E. Cummins, and J. P. Kerry, “Application of silver nanodots for potential use in antimicrobial packaging applications,” Innovative Food Science & Emerging Technologies, vol. 27, pp. 136–143, 2015.
[18] M. Mäder, T. Höche, J. W. Gerlach, S. Perlt, J. Dorfmüller, M. Saliba, R. Vogelgesang, K. Kern, and B. Rauschenbach, “Plasmonic activity of large-area gold nanodot arrays on arbitrary substrates,” Nano Letters, vol. 10, no. 1, pp. 47–51, 2010.
[19] J.-M. Moon and A. Wei, “Uniform gold nanorod arrays from polyethylenimine-coated alumina templates,” Journal of Physical Chemistry B, vol. 109, pp. 23336–23341, 2005.
[20] S. Roy and Z. Gao, “Nanostructure-based electrical biosensors,” Nanotoday, vol. 4, pp. 318–334, 2009.
[21] D. C. Ferrier, M. P. Shaver, and P. J. W. Hands, “Micro- and nano-structure based oligonucleotide sensor,” Biosensors and Bioelectronics, vol. 68, pp. 798–810, 2015.
[22] J. Lee, S. Cheon, J.-H. Choi, D.-G. Choi, J.- Y. Jung, S. Jeon, E. Lee, and J.- H. Jeong, “Shape-controlled fabrication of nanopatterned samarium-doped cerium oxide thin films using ultraviolet nanoimprint lithography,” Thin Solid Films, vol. 636, pp. 552–557, 2017.
[23] Y. Chen, “Nanofabrication by electron beam lithography and its applications: A review,” Microelectronic Engineering, vol. 135, pp. 57–72, 2015.
[24] B. Kim, S. L. Tripp, and A. Wei, “Self-organization of large gold nanoparticle arrays,” Journal of the American Chemical Society, vol. 123, pp. 7955– 7956, 2001.
[25] K. Sugano, “Nanotemplate-guided self-assembly of gold nanoparticles and its application to plasmonic bio/chemical sensing,” International Journal of Automation Technology, vol.12, pp. 79–86, 2018.
[26] Y. Li, Y. Chen, M. Qiu, H. Yu, X. Zhang, X. W. Sun, and R. Chen, “Preparation of aluminum nanomesh thin films from an anodic aluminum oxide template as transparent conductive electrodes,” Scientific Reports, vol. 6, pp. 1–7, 2016.
[27] Y. Cao, D. D. Nankivil, S. Allameh, and W. O. Soboyajo, “Mechanical Properties of au films on silicon substrates,” Materials and Manufacturing Processes, vol. 22, pp. 187–194, 2007.
[28] D. Guo, G. Xie, and J. Luo, “Mechanical properties of nanoparticles basics and applications,” Journal of Physics D: Applied Physics, vol. 47, pp. 1–25, 2014.
[29] M. Ramos, L. O. Jordan, A. H. Macias, S. Flores, J. T. Elizalde- Galindo, C. Rocha, B. Torres, M. Z. Chaleshtori, and R. R. Chianelli, “Hardness and elastic modulas on six-fold symmetry gold nanoparticles,” Materials, vol. 6, pp. 198–205, 2013.
[30] Mitsubishi Chemical. (2019, Feb.). Acryplen™ General Properties Data Sheet. Mitsubishi Chemical. Japan. [Online]. Available: https:// www.m-chemical.co.jp/en/products/departments/ mcc/industrial-medical/product/1201197_8054. html
DOI: 10.14416/j.asep.2019.09.001
Refbacks
- There are currently no refbacks.
.png){kind=logo}
